The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 1996
Filed:
May. 10, 1994
Applicant:
Inventors:
Usha Varshney, Radford, VA (US);
Lawrence H Decker, Christiansburg, VA (US);
Assignee:
American Research Corporation, Radford, VA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118726 ; 118727 ; 118730 ; 427596 ;
Abstract
A laser ablation deposition system includes a movable platform for supporting ferroelectric target material and a support structure for supporting a thermally sensitive semiconductor substrate within a chamber mounted on a moveable cabinet, and a laser for ablating the material mounted on a support frame along with various control components. The cabinet with the chamber may be moved away from the laser and support frame to allow the chamber to be raised to provide access to the components within the chamber. The system may be used to fabricate a multilayer thin film device using multicomponent oxides.