The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 1996
Filed:
Jun. 20, 1994
Lawrence A Wan, Malibu, CA (US);
BEI Electronics, Inc., San Francisco, CA (US);
Abstract
A diaphragm is disposed over a cavity formed in a silicon base. A plurality of electrodes are radially disposed about the diaphragm overlying the cavity, and a signal applying circuit applies a signal to the plurality of electrodes so that portions of the diaphragm flex for establishing a net angular momentum (e.g., the flexing of the diaphragm simulates a circumferentially traveling wave). A deformation sensing circuit comprising a plurality of strain gages interconnected to form a corresponding plurality of Wheatstone bridges are disposed about the periphery of the cavity along orthogonal axes for sensing deformation of the structure about the orthogonal axes.