The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 1996
Filed:
Dec. 16, 1994
Wolfgang Schreiber-Prillwitz, Villingen-Schwenningen, DE;
Horst Plankenhorn, Villingen-Schwenningen, DE;
VDO Kienzle GmbH, Villingen-Schwenningen, DE;
Abstract
A method for sealing apertures caused by manufacturing processes in micromechanical acceleration sensors is disclosed whereby apertures or recesses, serving for leading the conductor paths out of the oscillation space of an acceleration sensor without causing short circuits, can be sealed in a gas-tight manner in a simple way. The conductor paths establish the conducting connection between junction contacts of the acceleration sensor accessible from the outside with electrodes which are allocated on both sides to the oscillating mass of the acceleration sensor which is also configured as an electrode. The method provides to use an adhesive, which is curable or hardenable by means of light, and in particular, ultraviolet light. A specific quantity of the adhesive is applied at a certain point of the acceleration sensor and, after an experimentally determined distribution time period has elapsed, after which the adhesive has also penetrated into the recesses under the influence of capillary effect and has sealed same, is hardened or cured by exposure to light. The sealing process occurs in a nitrogen atmosphere. Prior to the above, the oscillation space was evacuated.