The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 1996
Filed:
Aug. 30, 1993
Hyundai Electronics Industries Co., Ltd., Kyoungkido, KR;
Abstract
A holographic interference exposing device using a visible laser source and a chopper to easily align the optical system while confirming the light path of the laser beam with the naked eye. The exposing device comprises a main laser source generating a short wavelength laser beam, a beam splitter for splitting the laser beam into two laser beams to cause a difference in the light path of the laser beam and to form an interference fringe on a semiconductor substrate, mirrors for guiding the laser beam to the beam splitter, and mirrors for focusing the two laser beams on a surface of the semiconductor substrate, an auxiliary laser source generating a long wavelength laser beam, and a chopper making the light path of the long wavelength laser beam get together with that of the short wavelength laser beam. The auxiliary laser source generates a visible laser beam having a wavelength longer than that of an ultraviolet laser beam.