The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 1996
Filed:
Oct. 04, 1994
Ronald E Sheets, Santa Ana, CA (US);
Tamarack Scientific Co., Inc., Anaheim, CA (US);
Abstract
Scanning microlithography apparatus for effecting exposures of substrates to radiation sources. A mask support and a substrate stage are disposed in spaced-apart positions directly opposite each other, witch a lens system between them and with a radiation source on the outer side of the mask support. The mask support and substrate stage are at a substantial angle to horizontal in order to achieve benefits including reduction in gravitation-induced sagging of the mask. A massive block of granite is provided at the substantial angle to horizontal, and has a flat face that keeps the mask support and substrate stage at desired positions relative to the radiation source and lens system, during scanning.