The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 1996
Filed:
Aug. 24, 1994
Christopher C Beatty, Landenberg, PA (US);
James W Baker, Elkton, MD (US);
Hewlett-Packard Company, Palo Alto, CA (US);
Abstract
A microactuator preferably in the form of a microminiature valve for controlling the flow of a fluid carried by a flow channel includes a first substrate having a thermally-actuated member selectively operated by a thermal actuator such that the first substrate thereby develops thermal energy, and a second substrate having opposed first and second major surfaces. The second substrate is attached to the first substrate at the first major surface. The second major surface defines an isolation cell for enclosing a volume when the second substrate is attached to the support to thereby reduce the thermal mass of the microactuator and to thermally isolate the first substrate from the support.