The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 1996
Filed:
Sep. 20, 1994
Applicant:
Inventors:
Amatzia Feinberg, Los Angeles, CA (US);
Chuong V Tran, Lawndale, CA (US);
Assignee:
Xerox Corporation, Stamford, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K / ;
U.S. Cl.
CPC ...
228116 ; 2282351 ; 228 443 ;
Abstract
A bonding system with interferometric inspection for real time planarity feedback and control is used to bond two substrates at atmospheric pressure. The interferometric vision system includes a crt monitor display to display the relative planarity between two objects to be bonded. If the planarity is not sufficient, the operator, based on the information displayed, may make infitesimal adjustments to the bonding system to improve the planarity. After the desirable planarity is achieved, a heat system is activated to further facilitate bonding.