The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 18, 1996

Filed:

Dec. 21, 1994
Applicant:
Inventors:

Hajime Sato, Itami, JP;

Yoshikazu Sakaue, Itami, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ; G01N / ;
U.S. Cl.
CPC ...
356372 ; 356383 ; 356394 ; 356237 ; 348126 ; 348130 ; 348131 ; 382146 ; 382149 ;
Abstract

A measurement apparatus includes two mirrors reflecting light rays obtained when a group of leads arranged on one lateral surface of a semiconductor device and a light-shielding band pattern are illuminated in two different directions. The measurement apparatus thus inputs the light rays into a single imaging device without moving the semiconductor device and the transparent mounting plate so that the distance traveled by one light ray from an illumination unit to the imaging device is equal to the distance traveled by the other light ray through the mirror to a second imaging device. Thus, an inexpensive measurement apparatus automatically measures the dimensions of a semiconductor device at high speed using an automatic feeding function and to produces highly accurate measurements.


Find Patent Forward Citations

Sato, Hajime. (1996). Measurement apparatus for measuring dimensions of semiconductor device (U.S. Patent No. 5528371). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5528371

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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