The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 1996
Filed:
Sep. 20, 1993
Darrell G Hill, Plano, TX (US);
William U Liu, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
Generally, and in one form of the invention, a method is disclosed for contacting a feature on an integrated circuit comprising: depositing a removable planarizing material 14 around the feature 10 so that a portion of the feature 10 extends above the removable planarizing material 14; depositing a masking layer 18 above the removable planarizing material 14, the masking layer 18 covering all but an exposed region above the feature 10 and an area around the feature; depositing an interconnect contact material 20 on the exposed region; and removing the masking layer 18 and the removable planarizing material 14, leaving the interconnect contact material 20 deposited on the exposed region, whereby a reliable, low capacitance, electrical contact is made to a very small feature 10.