The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 1996
Filed:
Aug. 17, 1994
Xingming Huang, Ibaragi-ken, JP;
Kouji Izunome, Ami-machi, Inashiki-gun, Ibaragi-ken, 300-11, JP;
Kazutaka Terashima, Ebina-shi, Kanagawa-ken, 243-04, JP;
Yutaka Shiraishi, Hiratsuka-shi, Kanagawa-ken, 254, JP;
Hitoshi Sasaki, Tsukuba-shi, Ibaragi-ken, 305, JP;
Shigeyuki Kimura, Ibaragi-ken, JP;
Research Development Corporation of Japan, Tokyo, JP;
Other;
Abstract
The amount of Group-V element included in a melt 6 has the close relationship with the oxygen concentration of the melt 6. This relationship is utilized for controlling the oxygen concentration of a single crystal 8 at a high level. The content of Group-V element is calculated from the weight of the melt 6 gauged by a gravimeter 11 and compared with a preset value in a control unit 12. When the calculated content is smaller than the preset value, the control signal to additionally supply Group-V element to the melt 6 is outputted from the control unit 12 to a feeder 14. When the calculated content is larger than the preset value, the control signal to supply a raw material to the melt 6 is outputted to another feeder 13.