The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 1996
Filed:
Nov. 21, 1994
Applicant:
Inventor:
Kazumi Haga, Chofu, JP;
Assignee:
New Creation Co., Ltd., Tokyo-to, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ; G01N / ;
U.S. Cl.
CPC ...
356445 ; 356371 ; 359606 ;
Abstract
An apparatus for inspecting the surface condition of an object comprises a light source, an optical element for directing irradiating light from the light source to an object and for converging the light reflected by the surface of the object at its back focal plane to form an image behind the back focal plane, and an observing apparatus for observing the image. An aperture stop is arranged at or near the back focal plane to cut off a scattered component of the reflected light. A half mirror having two planes forming a predetermined micro angle each other deflects the reflected light from the optical path of the irradiating light.