The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 1996
Filed:
May. 16, 1995
Panayotis C Andricacos, Croton-on-Hudson, NY (US);
Kirk G Berridge, Fishkill, NY (US);
John O Dukovic, Pleasantville, NY (US);
Helmut R Poweleit, Highland, NY (US);
Jeffrey S Richter, Kernersville, NC (US);
Lubomyr T Romankiw, Briarcliff Manor, NY (US);
Otto P Schick, Poughquag, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A fixture for supporting a workpiece in a processing cell includes a frame and cooperating workpiece holder. The frame includes a head having a hole therein which receives an integral plateau of the holder. The holder plateau includes an annular seal adjacent a perimeter thereof with a vacuum port disposed therein. The workpiece rests on the seal so that vacuum drawn in the vacuum port fixedly holds the workpiece against the plateau. Assembly of the holder plateau and workpiece thereon through the frame-head hole positions the workpiece coplanar with a front side of the frame. In exemplary embodiments, independent electrical current paths are provided to the workpiece and a surrounding auxiliary electrode.