The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 1996
Filed:
Dec. 15, 1994
Applicant:
Inventor:
Yoshimi Shiramizu, Tokyo, JP;
Assignee:
NEC Corporation, , FR;
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
95 87 ; 95115 ; 95143 ; 96101 ; 96143 ; 73 1902 ; 73 2327 ;
Abstract
A method for analyzing organic substances, includes the steps of subcooling a semiconductor substrate to a temperature at least lower than an ambient temperature, trapping volatile organic substances present in an atmosphere on the semiconductor substrate, heating the semiconductor substrate to thereby remove the volatile organic substances from the semiconductor substrate, and analyzing the volatile organic substances. This method is capable of selectively trapping to analyze only organic substances which might be adsorbed to a semiconductor device and thereby deleteriously affect the performances of the semiconductor device.