The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 1996
Filed:
Mar. 21, 1995
Seong I Kim, North Vale, NJ (US);
Other;
Abstract
A solid state cesium ion gun comprises an ion emission pellet, a pellet heating mechanism, a replaceable ion source unit, ion extraction electrodes, and a self-supporting feedthrough flange. The ion emission pellet is capable of emitting positive cesium ions. One end of the pellet is sputter coated with a thin film of porous tungsten (cathode) from which ions are emitted. The other end of the pellet (anode) is coated with platinum which enables application of a bias to the pellet to direct the cesium ions toward the emitting electrode. The area of the anode electrode determines the life of the ion source. The ion emission pellet is heated to 1000.degree. C. and is not in contact with the beam forming electrode so as to minimize the heat losses. A thin tantalum or molybdenum tube is used to enclose the pellet and minimizes heat conduction losses. The ion gun includes a replaceable ion source unit and a mountable gun unit which mounts extraction electrodes. The ion source unit can be replaced when the pellet has exhausted all of its cesium.