Liquid agent evaporator

Abstract

A liquid agent evaporator includes a sealed container accommodating a liquid agent therein and having a generally flat upper internal face and a vapor outlet, a carrier gas feeder for feeding the carrier gas into the sealed container, and a carrier gas blower provided in the upper internal surface of the sealed container for blowing the carrier gas fed from the carrier gas feeder so that the blown carrier gas comes into contact with substantially the entirety of the upper internal surface of the sealed container. The carrier gas blower is provided, for example, at the center of the upper internal surface of the sealed container and blows the carrier gas radially at an initial velocity directed at least to the upper internal surface side of the sealed container. The carrier gas blower can include a gas blow tube which is communicated with a gas feed tube and has a plurality of gas outlets formed on the top face side of the gas blow tube. By translating the gas blow tube so that the top face thereof comes to be in close proximity to the top face of the sealed container, the carrier gas blown from the gas outlets can reach substantially the entirety of the upper internal surface of the sealed container.