The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 1996

Filed:

Aug. 25, 1994
Applicant:
Inventors:

John H Bower, Livermore, CA (US);

Henry A Byorum, Monte Serano, CA (US);

Ronald E Rambeau, Vacaville, CA (US);

Assignee:

The BOC Group, Inc., Murray Hill, NJ (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419212 ; 20429821 ; 20429822 ; 20429823 ; 20429809 ; 20429828 ;
Abstract

In a rotatable magnetron, a seal cartridge having vacuum seals integrated therein provides a seal between a seal housing of the magnetron support assembly and a spindle carried therein. The seal cartridge is axially movable with respect to the magnetron support assembly which enables its efficient removal and replacement therefrom. As such removal and replacement of the cartridge automatically accomplishes the removal and replacement of the integral vacuum seals, no handling or reassembly of the vacuum seals is required. The seal cartridge of the present invention provides a protected seal design which improves seal integrity in rotatable magnetrons.


Find Patent Forward Citations

Loading…