The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 1996
Filed:
Apr. 29, 1994
Applicant:
Inventor:
Uwe Henninger, Berlin, DE;
Assignee:
Sentech Instruments GmbH, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324765 ; 3241581 ;
Abstract
In the atomic force microscopy method, the scanning system modified to provide high-frequency control is set into oscillation by electrical pulses having an amplitude that is adjustable and variable within a wide range. The pulses are so short that contact between the scanning tip and the sample is avoided. The pulse amplitude and/or form are varied in order to generate space charge zones in the semiconductor structures that are shaped differently within wide limits.