The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 1996
Filed:
Mar. 30, 1994
Kazuhisa Takamatsu, Kyoto, JP;
Akihiro Hisai, Kyoto, JP;
Hiroshi Kato, Kyoto, JP;
Masami Ohtani, Kyoto, JP;
Abstract
A plurality of nozzles and treating liquid supplying tubes are supported by rigid support arms forming part of temperature control piping for contacting the tubes to maintain treating liquids in the tubes to a constant temperature. The support arms are pivotable about a pivot axis located sideways from a substrate, such that the nozzles are movable between a dispensing position and a standby position displaced from above the substrate. A drive arm engages and swings a selected one of the support arms to move the nozzle attached to the selected support arm, between the dispensing position and standby position. With this construction, a nozzle selected from the plurality of nozzles is reliably moved in a predetermined posture to a predetermined position, while allowing sufficient temperature control of treating liquids by the temperature controlling piping, and avoiding inadvertent dripping of the treating liquids due to deformations of the treating liquid supplying tubes.