The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 1996
Filed:
Apr. 08, 1994
Johan E deRijke, Cupertino, CA (US);
Ebara Technologies Incorporated, Santa Clara, CA (US);
Abstract
Methods and apparatus for partial regeneration of a cryopump are provided. The cyropump includes first and second stage cryoarrays, a refrigerator for cooling the first and second stage cryoarrays, and typically includes a sorbent material for removing gases by cryosorption. The second stage cryoarray is heated from its operating temperature to a partial regeneration temperature range selected to liberate captured gas from the second stage cryoarray and to retain condensed water vapor on the first stage cryoarray. The partial regeneration temperature range is preferably 100K to 160K and is more preferably 120K to 140K. When the second stage cryoarray has a temperature within the partial regeneration temperature range, gas liberated from the second stage cryoarray is pumped with a turbomolecular pump in fluid communication with the cryopump. The turbomolecular pump removes liberated gases from the cryopump at high speeds and produces a low pressure in the cryopump. As a result, the tendency for contamination of the sorbent material is low.