The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 1996
Filed:
Apr. 07, 1994
Applicant:
Inventors:
Harry R Clark, Jr, Townsend, MA (US);
Gerald W Iseler, Chelmsford, MA (US);
Brian S Ahern, Boxboro, MA (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B26D / ;
U.S. Cl.
CPC ...
318575 ; 318625 ; 29 2501 ; 83 768 ; 83368 ; 83881 ;
Abstract
An instrument for forming nanometric features on surfaces of materials having a motor driven support for moving a workpiece on an X-Y-Z axis, a scribing tool of nanometric proportion engagable with the workpiece and a laser system for sensing movement. The tool is mounted on piezoelectric actuating means and the entire system is under the control of a programmed computer processing unit.