The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 1996
Filed:
Oct. 11, 1994
Jeremy Allam, Cambridge, GB;
Hitachi, Ltd., Tokyo, JP;
Abstract
A metal-semiconductor-metal (MSM) device comprises interdigitated metal electrodes (2, 3) on a semiconductor substrate (1). When embodied as a photoconductor, a photoconductive region (4) is bounded by layers (5, 6) which form a resonant cavity for incoming radiation to improve the response. In another embodiment, which can be either a photodiode or photoconductor, the electrodes are arranged to extend into the thickness of the photoresponsive layer (4). To reduce sensitivity to polarization,the electrodes may be arranged in sets extending in mutually transverse directions. Groups of the electrodes may be connected so as to be sensitive to polarization but substantially insensitive to the amplitude of incoming radiation.