The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 1996
Filed:
Aug. 25, 1994
Applicant:
Inventors:
Katsuyuki Machida, Kanagawa, JP;
Katsumi Murase, Kanagawa, JP;
Nobuhiro Shimoyama, Kanagawa, JP;
Toshiaki Tsuchiya, Kanagawa, JP;
Junichi Takahashi, Kanagawa, JP;
Kazushige Minegishi, Kanagawa, JP;
Yasuo Takahashi, Kanagawa, JP;
Hideo Namatsu, Kanagawa, JP;
Kazuo Imai, Kanagawa, JP;
Assignee:
Nippon Telegraph and Telephone Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437195 ; 437231 ; 437228 ;
Abstract
A semiconductor device includes an interlevel film constituted by a first dielectrics film containing dangling bonds and a bonded group of Si and hydrogen, and a second dielectrics film formed on the first dielectrics film.