The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 1996

Filed:

Mar. 09, 1995
Applicant:
Inventors:

Allen J Bourez, San Jose, CA (US);

Brij B Lal, San Jose, CA (US);

Michael A Russak, Los Gatos, CA (US);

Assignee:

HMT Technology Corporation, Fremont, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2041922 ; 20419212 ; 20419215 ; 20429808 ; 20429817 ; 20429816 ; 20429817 ; 20429819 ;
Abstract

A target assembly for use in fabricating magnetic recording media is described. The target assembly has inner and outer concentric targets for sputter depositing on a substrate first and second layers having different compositions. Disposed adjacent each target is a magnetic means, and at least one which is reversible in magnetic-pole polarity. One polarity produces a magnetic flux sufficient to ignite a sputtering plasma in the inner target only, when power is supplied to the inner target at a preselected level. The opposite polarity produces a magnetic flux sufficient to ignite a sputtering plasma in the outer target only, when power is supplied to the outer target at a preselected level.


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