Method for manufacturing an electrodisplacive actuated mirror array

Abstract

An array of M.times.N electrodisplacive actuated mirrors for use in an optical projection system is assembled by way of: (a) preparing a ceramic wafer made of an electrodisplacive material, having a top and a bottom surfaces; (b) providing on the bottom surface of the ceramic wafer an array of M.times.N first electrodes; (c) forming a first metallization on the top surface thereof; (d) mask bonding; (e) forming an array of M.times.N actuating members by providing M trenches thereon using a sandblasting method; (f) mounting the ceramic wafer on an active matrix; (g) mask removing; (h) forming a second metallization; (i) providing a first photoresistive layer; (j) electroforming; (k) removing the first photoresistive layer; (l) providing a second photoresistive layer; (m) forming a platform with a flat top surface; (n) providing a light reflecting layer; (o) pattern the light reflecting layer, including the platform, into an array of M.times.N mirrors; and (p) removing the second photoresist layer to thereby form an array of M.times.N electrodisplacive actuated mirrors.