The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 1996
Filed:
Mar. 31, 1994
Applicant:
Inventors:
Yoshikazu Yoshida, Izumi, JP;
Shinichi Mizuguchi, Katano, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H / ; H05H / ;
U.S. Cl.
CPC ...
250251 ;
Abstract
In an excitation atomic beam source for use in doping impurities to a semiconductor, a magnetic field is generated in a space between a nozzle (12) and a skimmer (13). A microwave discharge is generated in the space to form a plasma in the space by applying microwaves to a gas to be ionized emitted from the nozzle (12). In this manner, high-velocity particles and excited atoms in the plasma are passed through the skimmer (13) to thereby generate a supersonic excitation atomic beam.
Yoshida, Yoshikazu. (1996). Excitation atomic beam source (U.S. Patent No. 5506405). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5506405
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile