Supercritical fluid recirculating system for a precision inertial

Abstract

Fluid cleaning apparatus for precision parts, comprising in combination, a chamber, having a fluid inlet and a fluid outlet, for holding parts to be cleaned and a fluid tight recirculating flow system including the chamber. The fluid tight system directs supercritical carbon dioxide fluid flow across the parts being cleaned. A fluid recirculating cylinder has a first fluid port and a second fluid port connected in the flow system. A fluid piston is in the cylinder between said ports. A pneumatic cylinder has a further piston between a first pneumatic port and a second pneumatic port. A driving member is connected between the pistons for reciprocal movement caused by air from a source alternately introduced to the pneumatic ports to cause the fluid piston to pump fluid through the chamber and back to the recirculating cylinder. A shuttle valve is connected between the air source and the pneumatic ports. Two actuators are responsive to different positions of the driving member for switching the shuttle valve alternately to direct air from the supply to the pneumatic ports and exhaust used air. A plurality of one way valves are in the system to insure that the fluid pumped by the piston exhibits unidirectional flow through the chamber. A filter is connected in the fluid flow system upstream of the chamber.