The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 1996
Filed:
Feb. 16, 1995
Applicant:
Inventors:
Yijian Jin, Tonawanda, NY (US);
Theodore F Fisher, Amherst, NY (US);
Assignee:
Praxair Technology, Inc., Danbury, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F25J / ;
U.S. Cl.
CPC ...
62 11 ; 62 20 ; 62 28 ;
Abstract
A cryogenic system for the recovery of fluorine compounds from a carrier gas stream such as an effluent stream from a semiconductor facility comprising a mass transfer contacting device, such as a cryogenic wash column, integrated with a cryogenic rectification column system.