The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 1996
Filed:
Dec. 15, 1992
Masato Fujinaga, Itami, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
Improved setup of process parameters for manufacturing of a semiconductor device is disclosed. Using parameters which are necessary for attaining a threshold voltage of a semiconductor device, process simulation is performed to thereby compute the threshold voltage. Whether the computed threshold voltage has a predetermined value is then judged. The parameters are updated until the predetermined value is reached. The simulation involves partitioning the semiconductor device into fine discrete cells. A boundary region is defined which delineates neighboring cells. Since a range of the boundary region is considered in the simulation, prediction of impurity concentration is accurate.