The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 1996
Filed:
May. 05, 1994
Hiroshi Okano, Moriguchi, JP;
Naoki Tanaka, Moriguchi, JP;
Kenichi Shibata, Moriguchi, JP;
Yusuke Takahashi, Moriguchi, JP;
Sanyo Electric Co., Ltd., Moriguchi, JP;
Abstract
A surface acoustic wave device adapted to attain a higher acoustic velocity than conventionally by realizing SH waves excitable at a higher frequency than the fundametal mode of Rayleigh waves. Aluminum is sputtered for deposition on the R-plane of a sapphire substrate 1 using a sputter ion source, and at the same time, the R-plane of the substrate 1 is irradiated with a nitrogen ion beam having energy of 50 to 250 eV at a current density of 0.2 to 1.0 mA/cm.sup.2 using an assist ion source to form an aluminum nitride thin film 2 on the R-plane of the substrate 1 with the [00.1] axis of the film tilted with respect to a normal to the substrate.