The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 1996
Filed:
Jun. 23, 1994
Applicant:
Inventors:
Joseph M Ilardi, Sparta, NJ (US);
George Schwartzkopf, Franklin Township, NJ (US);
Assignee:
Mallinckrodt Baker, Inc., Phillipsburg, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23G / ;
U.S. Cl.
CPC ...
134-3 ; 134-2 ;
Abstract
Process for cleaning wafer substrates of metal contamination while maintaining wafer smoothness by contacting the wafer substrates with a cleaning composition comprising an aqueous, metal ion-free base and an amphoteric surfactant and optionally a metal complexing agent and a propylene glycol ether organic solvent.