The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 1996
Filed:
Dec. 14, 1994
Applicant:
Inventor:
Yoshiyuki Saito, Yamagata, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
427523 ; 118665 ; 118688 ; 118715 ; 4272481 ;
Abstract
In controlling an ion implantation unit, a dose of ions is calculated for every lot, and it is determined whether or not the dose D of ions is within an allowable range. When the dose of ions is within the allowable range, the ion implantation unit is operated for the next lot. When the dose of ions is not within the allowable range, the ion implantation unit is stopped.