The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 1996
Filed:
Jun. 07, 1994
Applicant:
Inventors:
Bernhard Grobler, Jena, DE;
Hartmut Heinz, Jena, DE;
Peter Huttel, Jena, DE;
Gunter Schoppe, Jena, DE;
Assignee:
Carl Zeiss Jena GmbH, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356376 ; 356371 ;
Abstract
An arrangement generates a projection beam path on the projection objective outside of the optical axis. This is achieved by mounting an optically transparent wedge forward or rearward of the test pattern. The wedge can be rotated with respect to its orientation by 180.degree..