The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 1996
Filed:
Apr. 26, 1994
Applicant:
Inventors:
Tomotake Furuhata, Kawasaki, JP;
Toshiki Hirano, Tokyo, JP;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N / ; B23Q / ;
U.S. Cl.
CPC ...
310309 ; 310323 ; 310328 ;
Abstract
A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by a device which includes a driving section bonded to a silicon wafer for applying a driving force to excite vertical motion, and a mechanism for converting this vertical motion into rotational motion. Three types of micro actuators are described herein: one, that uses vibration as its driving force; a second, that uses Coulomb's force; and a third, that utilizes fluid pressure, such as air.