The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 1996
Filed:
Jan. 28, 1994
Philippe Renaud, Ochettaz, CH;
CSEM Centre Suisse d'Electronique et de Microtechnique SA, Neuchatel, CH;
Abstract
The invention relates to a capacitive absolute pressure measurement sensor having a first element (2) in which is arranged a mobile electrode (4), a second element (6) in which is arranged a fixed electrode (8) situated facing and insulated from said mobile electrode (4), a connecting frame (10) interposed between the first element and the second element to define a chamber (12) insulated from the external environment and inside of which there is substantially zero pressure, and a reference volume (14) connected to the chamber. The first element (2) has the configuration of a membrane of substantially constant thickness and the reference volume (14) is arranged at least partially in the second element (6).