The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 1996
Filed:
Nov. 14, 1994
Applicant:
Inventors:
Roland E Stalder, Pasadena, CA (US);
Thomas R Van Zandt, Redondo Beach, CA (US);
Michael H Hecht, Los Angeles, CA (US);
Frank J Grunthaner, Glendale, CA (US);
Assignee:
California Institute of Technology, Pasadena, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250305 ; 2503 / ;
Abstract
An energy filter for charged particles includes a stack of micro-machined wafers including plural apertures passing through the stack of wafers, focusing electrodes bounding charged particle paths through the apertures, an entrance orifice to each of the plural apertures and an exit orifice from each of the plural apertures and apparatus for biasing the focusing electrodes with an electrostatic potential corresponding to an energy pass band of the filter.