The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 1996
Filed:
Nov. 14, 1994
Stanley J Lukasiewicz, North Attleboro, MA (US);
Robert P Bishop, Pembroke, MA (US);
Robert O Southworth, Pawtucket, RI (US);
Keith W Kawate, Attleboro Falls, MA (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A monolithic capacitive differential pressure transducer (10, 44,) is shown composed of ceramic material having first and second cavities formed adjacent to opposed face surfaces to form first and second flexible diaphragms (12, 14; 50, 52) and a motion transfer pin (24, 58) attached to and extending between the diaphragms. Capacitor plates are disposed on a surface of at least one flexible diaphragm and a stationary member to form a capacitive gap. Component parts are first pressed from ceramic powder and assembled into a unit using one of several methods including relatively high pressure to press them together or using a combination of low pressure along with raising the temperature of the material to soften the binder in the ceramic material at surfaces of the parts which are to be joined together. Selected gaps, both along the x-y direction and along the z direction may be obtained, particularly in assembling the parts using high pressure using consumable spacer material which is sublimated in a debinderization cycle prior to sintering of the unit to form a monolithic body.