The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 1996
Filed:
Aug. 17, 1994
Applicant:
Inventors:
Haruki Yokoyama, Kanagawa, JP;
Masanori Shinohara, Kanagawa, JP;
Assignee:
Nippon Telegraph and Telephone Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
117 89 ; 117 91 ; 117 99 ; 117102 ; 117954 ;
Abstract
An atomic layer epitaxy method uses an organometal consisting of a metal and an alkyl group and having a self-limiting mechanism. At least one bond between the metal and the alkyl group of the organometal is dissociated, and organometal molecules consisting of the metal and the alkyl group, and a hydride or organometal molecules consisting of a different metal are alternately supplied on a substrate while at least one bond is left, thereby growing an atomic layer on the substrate. An atomic layer epitaxy apparatus is also disclosed.