The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 1996
Filed:
Oct. 28, 1994
Applicant:
Inventors:
Stephen R Matte, Norfolk, MA (US);
Alan L Weeks, South Easton, MA (US);
Philip A Lessard, Boxborough, MA (US);
Assignee:
Helix Technology Corporation, Mansfield, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
62 555 ; 415 90 ; 417901 ;
Abstract
A cryogenically cooled water pump traps water vapor with a high probability but is open to non-condensing gases for high conductance to a turbomolecular pump. The preferred array is a single cylinder, having a length to diameter ratio of between 0.5 and 1, concentric with and near to an ambient temperature conduit. A center baffle, preferably of closed frustoconical shape, may be positioned at the center of the array over the upper bearing plate of the turbomolecular pump where it results in minimal reduction in conductance to the pump.