The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 1996
Filed:
Oct. 03, 1994
Applicant:
Inventor:
Shinichi Chikaki, Tokyo, JP;
Assignee:
NEC Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ; B08B / ; B08B / ;
U.S. Cl.
CPC ...
15-3 ; 134902 ;
Abstract
A cleaning apparatus has a roller unit coated with an adhesive layer formed from acrylic emulsion for eliminating contaminants from a surface of a semiconductor wafer and a washing unit for washing away a piece of adhesive substance left on the surface of the semiconductor wafer, and the adhesive layer formed from acrylic emulsion is so large in tackiness and hydrophilic that the cleaning apparatus removes not only large but also micro particles without residue of the adhesive substance on the surface of the semiconductor wafer.