The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 09, 1996

Filed:

Dec. 20, 1993
Applicant:
Inventors:

Yasushi Kaneda, Tokyo, JP;

Koh Ishizuka, Ohmiya, JP;

Hiroshi Kondo, Yokohama, JP;

Satoshi Ishii, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ; H01J / ; H01J / ;
U.S. Cl.
CPC ...
359566 ; 2502 / ; 359571 ;
Abstract

A displacement detection apparatus comprises a light source 1, a first diffraction grating including a blazed grating for diffracting and splitting light from the light source to irradiate a 0-order diffraction light and a +1-order diffraction light to a second diffraction grating, a third diffraction grating including a blazed grating for combining a +1-order reflected diffraction light produced by the reflection and diffraction of the 0-order diffraction light by the second diffraction grating and a -1-order reflected diffraction light produced by the diffraction of the +1-order diffraction light by the second diffraction grating to produce an interference light, and a photo-sensing element for converting the interference light to a signal representing a change in the second diffraction grating.


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