The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 1996

Filed:

Aug. 22, 1994
Applicant:
Inventors:

Shigekazu Nagai, Ibaraki, JP;

Shigeru Sugano, Ibaraki, JP;

Mitsuhiro Saito, Ibaraki, JP;

Takashi Takebayashi, Ibaraki, JP;

Hiroshi Matsushima, Ibaraki, JP;

Yoshiharu Ito, Ibaraki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L / ; G01L / ;
U.S. Cl.
CPC ...
364558 ; 73 / ;
Abstract

In a vacuum unit which can electrically process information, a vacuum pressure value is detected by a detecting device and a desired pressure value is set by a setting device. The so-set desired pressure value is digitally displayed on a displaying device and stored in a storing device. The set desired pressure value is compared with the detected vacuum pressure value by a determining device. When the result of comparison is brought to a given value, it is determined that an unusual or improper state has been developed. When the set desired pressure value and the detected vacuum pressure value coincide with each other in a predetermined range, a predetermined signal is produced from an output device. The displaying device is provided with an adjusting device capable of adjusting the state of visual recognition of each pressure value.


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