The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 1996
Filed:
Jun. 18, 1993
Hiroo Fujita, Sayama, JP;
Citizen Watch Co., Ltd., Tokyo, JP;
Abstract
A device capable of simultaneously measuring vertical hight of shapes and surface shape characteristics of an object, maintaining high precision. An acousto-optical element generates two beams of different frequencies of which the intensity distribution can be freely controlled. The optical device is provided with an optical heterodyne interference function and a cofocal scanning microscope function, and the extrasurface shape is measured by detecting the phase of a reflected light signal and the intrasurface shape is measured by detecting the cofocal point of a reflected light intensity signal. The extrasurface and intrasurface shapes can be simultaneously measured maintaining high precision in real time. The two beams used as probe light are little affected by vibration, etc., and make it possible to obtain stable measurement. The reflected light signal needs be simply processed using a small and cheaply constructed device which lends itself well to in-line measurement in production lines.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile