The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 1996
Filed:
Oct. 28, 1993
Applicant:
Inventors:
Hans J Bittner, Ingelheim, DE;
Hans-Jurgen Klein, Bad Gandersheim, DE;
Thomas Kupper, Bad Gandersheim, DE;
Ewald Morsen, Morfelden, DE;
Assignee:
Schott Glaswerke, Mainz, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C / ; B05C / ; C23C / ;
U.S. Cl.
CPC ...
118667 ; 118666 ; 118688 ; 118692 ; 118710 ; 118715 ; 118724 ; 118726 ;
Abstract
An apparatus supplies CVD coating devices with coating gas and includes an intermediate reservoir for accommodation of the gaseous coating material arranged between a storage tank and a coating device. The volume of the reservoir is set to a predetermined, maximum pressure change in the intermediate reservoir upon withdrawal of the mass of gas required for a coating step. The intermediate reservoir can be connected to a gas recovery station.
Published as: