The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 1995
Filed:
Oct. 01, 1993
Applicant:
Inventors:
Kathleen M Humpal, Woodbury, MN (US);
James P Mathers, Woodbury, MN (US);
Michael B Hintz, Mahtomedi, MN (US);
Assignee:
Minnesota Mining and Manufacturing Company, St. Paul, MN (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C04B / ; C04B / ; C04B / ;
U.S. Cl.
CPC ...
20419213 ; 20419212 ; 501 88 ; 501 98 ; 501152 ; 264 41 ; 264 63 ; 264 65 ;
Abstract
Electrically conductive sputtering target comprising yttria and amorphous carbon, a method of making the same, and a method of using the same.