The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 1995
Filed:
Jan. 06, 1995
Kazuya Ota, Tokyo, JP;
Hiroki Okamoto, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
In an alignment apparatus for irradiating detection laser beams LB1 and LB2 to an alignment mark and detecting a position of a wafer 1 by using a light produced from the alignment mark, a width d of a recess 2b of the alignment mark along an alignment direction is set to be smaller than a length (.lambda.+c) which is larger than a wavelength A of the laser beams LB1 and LB2 by a predetermined amount c, to thereby provide an alignment apparatus in which it is hard to create a detection error even if the alignment mark is asymmetric.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile