The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 1995
Filed:
Jan. 28, 1993
Van Le, Austin, TX (US);
Advanced Micro Devices, Sunnyvale, CA (US);
Abstract
An improved ion implant device is provided having programmable and graphical user interface. The ion implant device can be accessed by a remote computer such as an IBM.RTM.-compatible PC/XT/AT personal computer to allow an operator to access, control and monitor the implant device from a remote location. Various control signals associated with implant operation can be changed or modified according to implant parameters stored within the computer. Each time a wafer lot is to be processed, the implant parameters can be quickly retrieved from the computer and read to the implant device with minimum operator error. Likewise, various implant parameters and/or implanter settings can be written to the computer and stored within the computer's memory. The computer can be easily interfaced or retrofitted to existing implant devices with only a minimum amount of necessary software code and associated hardware.