The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 1995
Filed:
Dec. 27, 1993
Applicant:
Inventors:
Daniel T Hurley, San Ramon, CA (US);
Ching-Lang Chiang, San Jose, CA (US);
Neeraj Khurana, Monte Sereno, CA (US);
Assignee:
Hypervision, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
324750 ; 324251 ; 414222 ; 250310 ; 25044211 ;
Abstract
An emission microscope is mounted on a transportable structure for use on a test floor and encloses or garages an entire automatic test equipment head to facilitate high-speed testing. Test procedures allow development of static/fixed defects over time. A video mask can be developed based on emission sites on known good devices so that only emission from defect sites of bad devices under test are shown.