The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 1995
Filed:
Sep. 02, 1993
Nick Tsujimoto, Morago, CA (US);
Michael Weiss, Danville, CA (US);
MDC Vacuum Products Corporation, Hayward, CA (US);
Abstract
A rotating all metal sealed fluid delivery system for supplying fluid to an apparatus, such as an electron beam source assembly, in an UHV environment includes a housing with fluid inlet and outlet ports therethrough, opposed fluid inlet and outlet lines, an inlet and outlet bellows within the housing, and a turntable mounted in an aperture in the housing for attachment to a rotatable spindle of the apparatus. A ultra high vacuum compression gasket forms an UHV seal between the spindle and the turntable. The bellows are attached at first ends to the inlet and outlet ports, and at opposite ends to the opposed inlet and outlet lines extending to the rotatable apparatus, through the spindle and the turntable into the housing. The bellows are coiled within the housing and separated by a non-abrasive plate. Following attachment to the ports and lines, the entire length of each bellows remains within a single plane during rotation along the same axis as the axis of rotation of the apparatus. As the spindle rotates up to 360.degree., the oppositely wound bellows are moved along the axis of rotation of the spindle where one coils as the other uncoils, all in the same horizontal plane.