The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 1995
Filed:
Mar. 11, 1994
Applicant:
Inventors:
James E Holliday, Colorado Springs, CO (US);
Gary M Gallagher, Colorado Springs, CO (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65D / ;
U.S. Cl.
CPC ...
206711 ; 118500 ; 141 98 ; 206454 ; 211 40 ; 414217 ; 414417 ;
Abstract
An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. The holder also includes a purging arrangement attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder.