The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 1995
Filed:
Oct. 21, 1992
Akihiro Yano, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A structure of a semiconductor accelerometer which includes a body having a mass, beams for supporting the mass and gauge resistors provided on the beams, upper and bottom covering members sandwiching the body so as to form apertures over and under the mass and at least one through hole provided in at least any one of said upper and bottom covering members. Preferably, the through hole is provided at a center portion of the upper covering member. A probe passes through the through hole and the mass is pressed down with the top of the probe by which a predetermined strain is caused at the beams having the gauge resistors. This permits a measurement of the characteristic of the output voltage to the variation of the mass in the vertical direction.